Aneurysm of the superficial temporal artery is rare. We reviewed seven cases of aneurysm of the superficial temporal artery, which were confirmed surgically and angiographically. The results were as follows: The most common site of aneurysm was left superficial temporal artery, major feeding artery was anterior branch of superficial temporal artery, mean diameter was 7.8mm×12.6mm, and all aneurysms showed lobulated margin with intraluminal filling defects.